Core features of the equipment
Heating system:
Multi zone independent temperature control: The furnace body is divided into 6-12 independent heating zones along the axis, and each zone is precisely adjusted by an independent PID controller.
-High stability heating element: using high-quality resistance wire or silicon carbide rod, slow aging, stable power output.
Temperature measurement and control
High precision thermocouple: directly monitors the temperature in each temperature zone with an accuracy of ± 0.1 ℃.
-Advanced temperature field algorithm: Predicting and compensating for edge effects and load changes through software models, dynamically optimizing power allocation in each area.
Airflow and process chamber
-Optimized aerodynamic design: The quartz furnace tube is equipped with baffles, spray heads, or special structures to ensure that process gases (O ₂, N ₂, H ₂, etc.) pass uniformly and laminar through each wafer.
-High flow flushing: Quickly replace gas, reduce cross contamination, and ensure process repeatability.
Quartz system
-High purity synthetic quartz: resistant to high temperatures, low precipitation, and avoids metal contamination.
-Precision boat/bracket: Ensure consistent wafer spacing and reduce obstruction effects.

Device Name

Large caliber vacuum diffusion furnace

Specification Model

NBD-T1200-400T5D4ZY-435

power supply

AC380V 50HZ

rated power

65KW

Number of temperature zones

Single temperature five control

temperature control accuracy

±1℃

sensor type

K-type thermocouple with a diameter of 1 * 250mm

Tmax

1200℃

Long term working temperature

1100℃

Recommended heating rate

≤20℃/min

Size of furnace temperature zone

Φ460*1625mm

Furnace tube specifications

quartz tubeφ400*2400*5mm

Mass flow controller

S500 2000SCCM with a diameter of 6.35 and a 2-meter double card sleeve. Fluorine rubber sealed nitrogen calibration for the short wire
S500 10SLM with a diameter of 6.35 and double card sleeves, 2-meter short wire, fluorine rubber seal, nitrogen calibration

Constant voltage control range

100-90000Pa

Air inlet and outlet interface

Air inlet: Double card sleeve with a diameter of 6.35
Air outlet: 12mm diameter pagoda mouth
Safety valve outlet: φ 8mm pagoda outlet
Draw the real blank: KF40

vacuum pump

DRV60 KF40 three-phase

Furnace body size

Length 3080 (right bracket fully open, length 3750) * Height 1838 * Depth 880mm

Heating chamber

Insulation materials: crystal fibers, etc
Insulator: high-purity corundum, spacing adjusted according to temperature field
Port transition ring: vacuum formed alumina fiber.
Temperature zones: 3, 4, 5, 6

control system

1. Sintering process curve setting: dynamically display the set curve, and the equipment sintering can pre store multiple process curves, each of which can be freely set;
2. Pre order sintering is available to achieve unmanned sintering process curve sintering;
3. Real time display of sintering power, voltage and other information, recording of sintering data, and the ability to export for paperless recording;
4. Capable of remote control and real-time observation of equipment status;
5. Temperature correction: The difference between the main control temperature and the sample temperature is nonlinearly corrected throughout the sintering process.

heating element

Using high-quality heating wires: KANTHAL and HRE

Vacuum sealing system

gas supply system

temperature accuracy

±1℃

Net weight

About 800KG

Equipment usage precautions

11. Asbestos gloves must be worn when collecting samples, and quartz devices should be carefully broken when using them;
2. Choose a suitable quartz boat, take out the cleaned quartz pallet and quartz hook;
3. Insert the sample into the groove of the quartz boat and use a quartz hook to push the quartz boat into the furnace tube to the constant temperature zone;
4. The pressure inside the furnace tube shall not exceed 0.15 MPa (absolute pressure) to prevent danger caused by excessive pressure;
5. When used under high vacuum, the operating temperature of the equipment should not exceed 1000 ℃;

Service Support

一Annual limited warranty, providing lifetime support (warranty scope does not include consumable parts such as processing tubes and O-rings, please order replacement parts at the relevant product below).