NO.

major dispositions

NBD-103(A)system

NBD-103(B)system

1

mechanical pump

Pumping rate: 4L/S

Motor power: 400W

The ultimate pressure is 6X10-2Pa

Pumping rate: 6L/S

Motor power: 500W

The ultimate pressure is 6X10-2Pa

2

Molecular pump parameter

Pumping rate: 100L/S

Limit pressure: 6X10-6Pa

Startup time: < 2min

Rated speed: 43000 RPM

Cooling method: Air cooling/water cooling

Pumping rate: 600L/S

Limit pressure: 6X10-6Pa

Startup time: < 2min

Rated speed: 27000 RPM

Cooling method: Air cooling/water cooling

3

Molecular pump control power supply

Voltage: 200~240V

Output power: 250W

Acceleration time: 3 minutes

Output frequency: high-speed 704Hz±10%

Low speed 430 Hz±10%

Voltage: 380~410V

Output power: 400W

Acceleration time: 3 minutes

Output frequency: high-speed 704Hz±10%

Low speed 430 Hz±10%

4

Combined vacuum gauge

Operating voltage:

220V  50~60HZ

Resistance of the resistance gauge: about 85 OhMs

Automatic protection (ionization) >10Pa

Ionization gauge measuring range: 100~1010-5Pa

Resistance gauge measuring range: 105 ~ 10-1 pa

Operating voltage:

220V  50~60HZ

Resistance of the resistance gauge: about 85 OhMs

Automatic protection (ionization) >10Pa

Ionization gauge measuring range: 100~1010-5Pa

Resistance gauge measuring range:

105 ~ 10-1 pa

5

High vacuum manual cut-off valve

Fluorine rubber ring seal, quick discharge flange interface, leakage rate of 5X10-9 Pam3/s

Fluorine rubber ring seal, quick discharge flange interface

Leakage rate up to 5X10-9 Pam3/s

6

connecting line

Using all stainless steel, electropolishing production, parts welding leakage rate is better than 1×10-9Pa.m3/s

Using all stainless steel, electropolishing production, parts welding leakage rate is better than 1×10-9Pa.m3/s