Main features:
1. Cleaning and coating in one go, eliminate secondary pollution;
2. Upper open structure, easy to observe the sample;
3. The product adopts automatic control mode, touch screen, digital display;
4. The effect of rapid heating and cooling can be achieved by sliding the furnace body;
5. Stable radio frequency power supply, uniform temperature distribution, improve the quality of film forming.

Model

NBD-PECVD1200-50T2-N

Electrical Spec

AC220V 3KW   Rf power: 300 or 500 watts 13.56Mhz

Max working temps.

1100℃

Heating rate

≤20℃/min

Length of heating zone

200mm+200mm (two heating zones are heated separately, and the split design allows the temperature gradient to reach the limit)

Tube size

Φ50*1800mm

RF coils