Main features:

1, the maximum output power of RF power supply: 500W (continuously adjustable), the maximum reflected power 70W;

2. Excellent electromagnetic shielding scheme, efficient and safe!

3, special-shaped high purity quartz furnace tube, large capacity reaction space;

4, unique rotation (60 precision design) pendulum structure, to ensure the material and plasma full contact;

5, three high precision mass flowmeter (can be customized according to requirements), integrated gas mixing system;

6. Unique inlet and outlet design ensures convenient inlet and outlet of equipment under complex structure;

7, RF system, vacuum system, rotary pendulum system is fully integrated in one, 7 inch full touch screen operation, easy to operate, intuitive;

8, can save six groups of process parameters, at any time to call;

9, the experimental data can be automatically screenshot, and support USB interface export.

Electrical Spec

AC220V    1.5KW

Equipment dimensions

W1300mm×H1250mm×D760mm；

L300mm (customizable, welded with three groups of agitation baffles in the pipe), pipe diameter in non-RF area: φ 60mm;

Reverse Speed 

R/min (stepless speed regulation);

Tilt over angle

-Max. dumping angle of 3 ° -+3 ° 30 °

Pressure of reaction chamber

5~80pa

Flange structure

Aviation aluminum quick-open mode;

operating system

NBD-101EP centralized bus control integrated system, 7 "true color touch screen control, intelligent fuzzy PID control; Intelligent man-machine conversation mode;

Power of electric push rod

50W

RF power supply

Output power of 10-500W is adjustable continuously, RF frequency: 13.56MHz ± 0.005%, fully automatic matching;

Vacuum Test

Digital vacuum gauge acquisition device;

Vacuum acquisition

NBD-4C mechanical vacuum pump (220V/50Hz), power: 0.4KW, pumping speed: 4m³/h;

Air supply system

Air supply system

Equipment details

Partial interface £¬ PII

control system

Net weight

约320KG

Precautions for equipment use

Generally, the RF matching device is in automatic matching state, and the matching can only be conducted when the power reaches over 50W;
If manual matching is adopted, set the power to about 60W, and increase the power when manual tuning matching is appropriate
During operation, it is necessary to change the air flow of the cavity. First, set the power to zero. Do not press "OFF" button to turn off the RF output.

Service support

One year limited warranty with lifetime support;